Chinese Optics Letters, 2013, 11 (s1): S10404, Published Online: Jun. 14, 2013
Optical coatings on f iber for relative-humidity sensing applications Download: 839次
310.1620 Interference coatings 310.1860 Deposition and fabrication 310.4165 Multilayer design 310.6845 Thin film devices and applications
Abstract
A fiber-optic relative-humidity (RH) sensor composed of multilayer of porous dielectric films is proposed. The transducer deposited on fiber end-face is multilayer coating consisting of nano-porous TiO2 and SiO2 films, which forms a low-fineness Fabry-Perot (F-P) filter with one of minimum reflections at about 1 350-nm wavelength. The dielectric thin films realized by e-beam evaporation without ion-source assistance have columnar and porous structures, which exhibit sensitivity to RH change of environments. When the sensor is exposed to an environment of RH change from 10.9% to 92.8%, experimental results demonstrate 77.9-nm shift of characteristic wavelength.
Yun Cheng, Weijing Xie, Xun Yu, Hong Lu, Minghong Yang. Optical coatings on f iber for relative-humidity sensing applications[J]. Chinese Optics Letters, 2013, 11(s1): S10404.