研究了利用常规电火花线切割技术加工薄镍板微小结构的方法。利用慢走丝电火花线切割加工机床对厚度为0.6 mm镍板上的Meso尺度结构进行了加工试验。以机床现有的工艺条件对零件进行试切割, 对试切割后的尺寸精度和表面质量进行测量分析, 在此基础上通过对放电能量、冲液压力、切割速度等机床参数的调整改进加工工艺。探讨了在200 μm缝宽范围内进行多次切割的方法, 并对切割次数进行合理优化、合并。试验结果表明：慢走丝线切割加工对小于机床设定厚度的薄板Meso尺度结构仍可进行稳定加工; 通过多次切割的方法可提高表面质量。在200 μm窄缝范围内进行5次常规切割, 加工后的表面粗糙度值Ra为0.54 μm; 在保证表面质量的前提下, 将5次切割合并为3次切割, 加工后的表面粗糙度值Ra为0.62 μm, 加工时间缩短了30%左右。该技术可为电火花线切割加工其他材料薄板微小零件提供支持与参考。

A micro-fabrication method for thin nickel plates was explored by Wire-cut Electrical Discharge Machining (WEDM).A series of experiments of WEDM for the meso-scale structure of a thin nickel plate with a thickness of 0.6 mm were carried out. Then, a trial cutting test was performed using existing machining parameters in the machine, and the dimensional accuracy and surface quality of the thin nickel plate after cutting were measured and analyzed. On that basis, the machining process was improved by changing the discharge energy, flushing pressure and the cutting speed. The method of multiple cutting within a 200 μm narrow slit was discussed as well, and reasonable optimization and merger for cutting times were carried out. Experimental results indicate that the WEDM can cut the meso-scale structure with a thickness less than that of machine original setting in steady for the thin nickel plate. The surface quality can be improved after multiple cutting for the 200 μm narrow slit, and the final surface roughness Ra is 0.54 μm after fifth cutting. With the machining surface quality guaranteed, the final surface roughness Ra is 0.62 μm when the cutting times are merged from 5 into 3, by which the machining time is shortened by 30%.The method proposed can also apply to meso-scale structures of other materials.