设计了一种电极间隔为10 cm的介质阻挡放电装置, 以氩气为工作气体, 在低气压下产生等离子体。 采用发射光谱法, 研究了放电空腔内等离子体电子温度和电子密度随空间位置的变化规律。 等离子体电子温度的变化通过使用Corona模型计算获得, 等离子体电子密度的变化通过分析Ar原子750.4 nm谱线强度变化得到。 实验发现空腔内不同位置的等离子体电子温度和电子密度是不同的。 当测量位置从阴极向阳极移动时, 电子温度先略上升而后迅速下降, 再缓慢上升; 电子密度先缓慢而后迅速地增大。

In the present paper, a dielectric barrier discharge(DBD) plasma was generated at low pressure in a DBD device with the eletrode distance of 10cm and using Ar as working gas. The changes in electronic temperature and density in the discharge cavum were studied by means of emission spectrometry. The changes in electronic temperature measured by using corona model were obtained. The variations in electronic density were analyzed using 750.4 nm line intensity. It was found that the plasma electronic temperature and density is various at different positions in the discharge cavum. With the measuring point moving from cathode to anode, the electronic temperature firstly increases slowly, then decreases quickly. While the electronic density increases slowly at first, and then rapidly.