透射式微型X射线管是能量色散X射线荧光分析中的主要激发源, 在能量色散X射线荧光分析中希望得到谱分布较为单一的X射线管输出谱。 采用MC方法, 研究了透射式微型X射线管在不同目标靶厚度的情况下输出谱的特征, 通过低谱段（<5 keV）和高能谱段(5~50 keV)的分析比较, 高能谱段计数随厚度加大先增加而后减小, 低能谱段计数则随厚度增加减小, 增加目标靶厚度可以有效抑制低能谱段。 在入射电子能量为50 keV和目标靶为4 Ag的条件下, X射线管输出能谱具有较高的高能谱段注量, 同时有效压制低能谱段注量, 适合能量色散X射线荧光分析中使用。

The transmission anode micro X-ray tube is a key component of energy dispersive X-ray Fluorescence Analysis (EDXRFA) as exciting source. So in EDXRFA we hope to get the primary X-ray spectrum which is simply distributed. In the present paper, the authors used the Monte Carlo (MC) method to study the spectrum character of the transmission anode micro X-ray tube with different thickness of target. We cut the spectrum into high energy (5keV~50keV) part and low energy (<5 keV) part and compared them to each other. The result showed that the flux of high energy part is big and the flux of low energy part is small when the electron energy is 50 keV and the target is 4 μｍ thick Ag. This is better for EDXRFA.