Chinese Optics Letters, 2013, 11 (s2): S22401, Published Online: Aug. 22, 2013
Engineering localized hotspot both in transversal and longitudinal direction by plasmonic coupling between nano-particles and reflective metallic film Download: 569次
Abstract
A structure which consists of photoresist film sandwiched by Ag nano-particle and metal film is proposed to modify localized hotspot both in transversal and longitudinal direction. It shows that there is strong plasmonic coupling between Ag nano-particle and metallic surface, which helps to reduce the width and elongate the depth of the plasmonic hotspot localized inside photoresist film. And that fringes and side lobes around hotspots can be effective attenuated by bottom-side illumination. Influences of illumination, particles inter-space, and polarization are also studied. The method opens avenue for the potential applications such as lithography, optical storage, etc.
Jie Zhou, Jing Zhang, Changtao Wang, Zeyu Zhao, Jiayu He, Xing Tao, Xiangang Luo. Engineering localized hotspot both in transversal and longitudinal direction by plasmonic coupling between nano-particles and reflective metallic film[J]. Chinese Optics Letters, 2013, 11(s2): S22401.