提出了一种模拟准分子激光光能量分布的方法。通过使用Matlab软件分析实际拍摄到的准分子激光光能量分布彩色图像并提取相关信息进行计算，使用光学软件Zemax模拟出实际的准分子激光的光能量分布。实际准分子光源光斑的尺寸约为16.5 mm×35.4 mm，光束在x方向的发散角度约为3.3 mrad，在y方向的发散角度约为11.5 mrad。使用该方法所模拟的光源的光斑尺寸约为16.7 mm×35.3 mm，光束在x方向的发散角度约为3.41 mrad，在y方向的发散角度约为11.53 mrad，光能量分布在细节上与实际光源保持一致。该方法解决了准分子激光光能量空间分布较为复杂难以进行光学模拟的问题，同时也为准分子激光的光学特性研究以及应用于准分子激光光学元件的研发提供了技术基础。

A method to simulate the energy distribution of excimer laser is provided. The color image of an actual excimer laser energy distribution is captured, and the image and extract relevant information are analyzed using Matlab software. Meanwhile the actual excimer laser light source is simulated by the optical software Zemax. The beam dimension of the actual excimer laser light source is about 16.5 mm×35.4 mm. The beam divergence is about 3.3 mrad in the x direction, and 11.5 mrad in the y direction. The beam dimension of the light source simulated by this method is about 16.7 mm×35.3 mm, and the beam divergence is about 3.41 mrad in the x direction, and 11.53 mrad in the y direction. The energy distribution of the simulated light is consistent with that of the actual excimer laser light in details. This method provides a perfect solution to the optical simulation difficulty of the complex spatial energy distribution of the excimer laser. It also provides a technical foundation for the investigation on the optical property of excimer laser and development of its optical components.