采用中心波长800 nm、脉宽130 fs、频率1 kHz的飞秒激光脉冲对316L不锈钢样品，在高真空环境中进行了微结构制备研究。实验获得了飞秒激光对316L不锈钢的单脉冲烧蚀阈值；并分别对高于和低于能量阈值的激光在多次脉冲下激光能量的累积效应进行了实验研究。实验结果表明：高于阈值的单脉冲能量100 μJ，随着脉冲次数的增加，分别获得了亚微米级激光诱导周期性表面结构（LIPSS）、微米级波纹结构和微米级锥状钉结构；低于阈值的单脉冲能量20 μJ，在累积脉冲下也能获得LIPSS和微米级波纹结构。

We investigate microstructures on 316L stainless steel surface induced through using femtosecond laser with central wavelength of 800 nm and pulse duration of 130 fs at a repetition rate of 1 kHz in high vacuum. The single-pulse threshold of 316L stainless steel is obtained by experiment. The multi-pulse laser energy accumulation is experimentally studied with the laser fluences higher and lower than the single-pulse threshold, respectively. Experimental results show that with the laser fluence increasing, laser-induced periodic surface structures (LIPSSs) on the submicron scale, ripples and cone-shaped spikes on the micron scale are fabricated with single-pulse energy of 100 μJ which is higher than the threshold. And LIPSS on the submicron scale and ripples on the micron scale can also be obtained by multiple pulses with single-pulse energy of 20 μJ which is lower than the threshold.