提出了一种光机电一体化元件中数字微镜衍射的分析模型, 并用LightTools对该模型进行模拟仿真得到了数字微镜理论上的衍射角.随后用两种不同波长的激光照射到数字微镜表面并用坐标纸测量出了数字微镜实际的衍射角, 仿真结果与实验结果十分吻合.利用该衍射模型设计出了一种数字微镜控制的阿达玛变换光谱仪, 采用激光光源和卤素灯光源对仪器的性能进行了测试.结果显示：光谱仪的分辨率可以达到8 nm, 信噪比为1 366, 采集20次光谱的中心波长偏移仅为0.408 nm, 且仪器单次采集光谱时间为0.8 s.测量结果表明该光谱仪具有较高的分辨率和信噪比, 以及很好的重复性、稳定性和实时性.

An analysis model for Digital Micromirror Device(DMD) of optomechatronics integration element is proposed, and the theoretic angle of diffraction is obtained by using LightTools to simulate optimization of the analysis models. and then comparing the theory angle with the result of the experiment.The results of the experiment and the simulation conclusion are consistent with each other very well.We have designed a Hadamard transform spectrometer which based on this diffraction model.And then we test the spectrometer by Halogen lamp source: the resolution ratio of the spectrometer can achieve 8 nm, signal-to-noise ratio can achieve 1 366, the center wavelength drift is only 0.408 nm, and the single acquisition time is only 0.8 second, these results show that the spectrometer has good resolution ratio , good signal-to-noise ratio, good stablity,good repeatability and good real-time ablity. The spectrometer is very good to overcome the traditional Adama spectrometer poor shock resistance, acquisition speed, low precision, has the very high market potential.