基于CE-3极紫外(EUV)相机最高工作温度为70 ℃的要求，对EUV相机的微通道板(MCP)位置灵敏阳极光子计数成像探测器实验件在70 ℃时的性能进行了研究，该探测器主要由工作在脉冲计数模式下的MCP堆、楔条形感应电荷阳极及相关的模拟和数据处理电路组成。为了获得稳定的MCP堆电子增益及较小的暗计数率，对MCP堆进行了预处理，包括380 ℃条件下真空高温烘烤18 h，以及电子清刷100 μA·h，并测量了预处理前后暗计数率；测量了探测器工作在室温和70 ℃时的暗计数率、空间分辨率、增益，测量结果表明探测器的空间分辨率为5.66 lp/mm，与室温下空间分辨率相同，暗计数率虽然小于1 counts/(s·cm2)，但70 ℃暗计数率是室温的2~5倍；对探测器的使用寿命进行了初步分析。实验结果和分析表明探测器在空间分辨率、暗计数率、使用寿命等方面均满足EUV相机的要求。

A two-dimensional photon-counting imaging detector with induced charge wedge-strip anode in extreme ultraviolet (EUV) region is developed based on the maximal operating temperature of 70 ℃ for CE-3 EUV camera, which will be applied to the characteristic performance test at 70 ℃. The detector is mainly composed of microchannel plate (MCP) stacks operating in pulse-counting mode, wedge-strip position-sensitive anode and correlative analog and data processing circuit. A three-electrode wedge-strip induced-charge position-sensitive anode with 1.5-mm period and 47-mm diameter active area is designed and fabricated, and front-end analog and data circuit with the maximum rate of 200 kHz is also developed. In order to obtain MCP stack′s steady gain and less background noise, the preconditioning of MCP stack including 380 ℃ bake-out for 18 h and 100 μA·h bake-in is done, background rate is measured before and after preconditioning, and the curve of MCP stack′s gain versus high voltage applied to MCP stack is obtained. Operating characteristics of the MCP detector including background rate, spatial resolution are also measured. The life-span of the detector is analyzed. The measured results show that the spatial resolution can reach 5.66 lp/mm, and background noise is less than 1 counts/(s·cm2), they can completely satisfy the requirement of moon-based EUV camera on the spatial resolution, background noise and life-span.