为了评价高精度光学元件支撑装置的面形复现性指标，进行了分析计算和实验验证。在ANSYS有限元分析软件中建立了元件支撑的物理模型，进行了支撑结构的残余应力分析以及元件面形对干扰载荷的灵敏度分析，据此计算得到了支撑结构面形复现性均方根(RMS)误差。分析结果表明，基于目前结构设计和装配精度，元件支撑装置设计的面形复现性RMS优于0.14 nm。基于高重复性干涉检测装置构建了复现性测量平台，测量结果表明支撑装置面形复现性RMS优于0.18 nm。复现性检测实验结果和仿真结果能较好吻合，所得结果满足高复现性元件支撑技术的要求。

In order to evaluate the reproducibility of the high-precision optic mount, simulations and tests are undertaken. The model of the optic mount is built in ANSYS, and the residual stress in the mount and the deformation of the mirrors due to disturbance are analyzed, then the reproducibility root mean square (RMS) error of the optic mount is calculated. Calculation results indicate that based on the mount design and assembly accuracy, the reproducibility RMS that the optic mount achieves is better than 0.14 nm. The reproducibility metrology is carried out on the high repeatability interferometer device, and the result indicates that the reproducibility RMS of the optic mount device is better than 0.18 nm, which is in accord with the simulation, and meets the requirement of the reproducibility error budget.