红外与毫米波学报, 2013, 32 (5): 394, 网络出版: 2013-10-23   

基于光学读出非制冷红外成像系统的无基底FPA等效电学模型

Equivalent circuit model of the substrate-free focal plane array based on the optical readout uncooled infrared imaging system
作者单位
1 中国科学技术大学 中国科学院材料力学行为和设计重点实验室, 安徽 合肥 230027
2 中国科学院微电子研究所, 北京 100029
摘要
与传统的有基底FPA(焦平面阵列)相比, 基于全镂空支撑框架结构的新型无基底FPA在热学特性上存在显著差异, 传统的基于恒温基底假设的热学分析模型不再适用, 因此, 通过电学比拟方法, 将无基底FPA的热响应特性等效为电学模型.通过该模型, 进一步分析了无基底FPA在非真空环境下的热学性能, 分析表明: 该无基底FPA具有在大气压下优良的红外成像性能, 其NETD(噪声等效温度差)值仅比真空环境下增加了数倍.
Abstract
Thermal characteristics of new substrate-free FPA (focal plane array) with full hollow supporting frame structure are very different from that of traditional substrate FPA. The thermal analysis model which based on temperature-constant substrate assumption is not efficient any more. Therefore, an equivalent circuit model was presented to analyze the thermal response characteristics of substrate-free FPA with electrics and holistic approach. According to this model, the thermal characteristics of substrate-free FPA under non-vacuum environment were analyzed. The result shows that, the substrate-free FPA has excellent infrared imaging performances under atmospheric pressure, while its NETD (noise equivalent temperature difference) is just increased several times than in the vacuum environment.

张勇, 程腾, 张青川, 陈大鹏, 高杰, 毛亮, 吴健雄, 高越. 基于光学读出非制冷红外成像系统的无基底FPA等效电学模型[J]. 红外与毫米波学报, 2013, 32(5): 394. ZHANG Yong, CHENG Teng, ZHANG Qing-Chuan, CHEN Da-Peng, GAO Jie, MAO Liang, WU Jian-Xiong, GAO Yue. Equivalent circuit model of the substrate-free focal plane array based on the optical readout uncooled infrared imaging system[J]. Journal of Infrared and Millimeter Waves, 2013, 32(5): 394.

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