激光与光电子学进展, 2013, 50 (11): 110002, 网络出版: 2014-12-05
飞秒激光对硅表面微构造的研究进展 下载: 631次
Research Progress of Femtosecond Laser Fabricating Silicon-Based Micro/Nano Structure
摘要
综述了飞秒激光对硅表面微构造的研究进展。阐述了超短脉冲诱导硅材料表面深亚波长结构的形成机理,讨论了飞秒激光作用硅表面制备微纳结构的影响因素和该微纳结构的发光特性,介绍了飞秒激光诱导硅材料表面微纳复合结构的生物仿生特性。揭示了飞秒激光在微结构制备方面的广泛应用前景。
Abstract
The research progress of femtosecond laser microstructuring silicon surfaces is summarized. The formation mechanism of the deep subwavelength structure of silicon surfaces induced by ultrashort pulse is introduced, the influence factors of the preparation of micro-nano structures with femtosecond laser irradiating silicon surfaces and the luminescence properties of the micro-nano structures are discussed. The biological bionic characteristics of the micro-nano structures of silicon surfaces induced by femtosecond laser are introduced. The widespread application prospects of femtosecond laser in the preparation of the microstructures are put forward.
高胜淼, 韩培高, 闫珂柱. 飞秒激光对硅表面微构造的研究进展[J]. 激光与光电子学进展, 2013, 50(11): 110002. Gao Shengmiao, Han Peigao, Yan Kezhu. Research Progress of Femtosecond Laser Fabricating Silicon-Based Micro/Nano Structure[J]. Laser & Optoelectronics Progress, 2013, 50(11): 110002.