半导体光电, 2013, 34 (5): 755, 网络出版: 2013-11-01  

用于声光移频的声表面波谐振器

Surface Acoustic Wave Resonator for Acousto-optic Frequency Shifter
王春梅 1,2,3,*温志渝 1,2,3张祖伟 1,2,3
作者单位
1 重庆大学光电技术及系统教育部重点实验室
2 重庆大学国家新型微纳器件与系统技术重点学科实验室
3 重庆大学微系统研究中心,重庆 400044
摘要
针对一种喇曼型声表面波声光器件的设计需求,设计制作出一种能够满足喇曼-奈斯衍射要求的、低损耗、高Q值声表面波谐振器。利用耦合模(COM)理论仿真谐振器的性能,建立谐振器的COM模型,求解COM方程,提取出COM参数。利用COM软件仿真设计谐振器的结构参数,设计的谐振器中心频率为78.028MHz,Q值为10428,插入损耗为-6.153dB。利用微加工技术加工制作出声表面波谐振器,用矢量网络分析仪对其性能进行测试,得到谐振器实际中心频率为78.34MHz,插入损耗为-11.273dB,Q值为6465.7,该谐振器能够满足喇曼型声表面波声光器件的应用需求。
Abstract
According to requirements of a Raman-type acousto-optic device driven by surface acoustic wave (SAW), a SAW resonator with low loss and large Q value was designed and fabricated, which can meet the requirement of Raman-Nath diffraction. The performance of the resonator was simulated by establishing COM (coupling-of-model) model, solving COM equation and extracting COM parameters. The design parameters of the resonator were simulated by COM software, and it is show that the theoretical center frequency, Q value and insertion loss of the designed resonator are 78.028MHz, 10428 and -6.153dB, respectively. Then the resonator was fabricated with micromachining technology and its performance was tested with vector network analyzer. Such results are obtained as: the actual center frequency of 78.34MHz, insertion loss of -11.273dB, Q value of 6465.7.

王春梅, 温志渝, 张祖伟. 用于声光移频的声表面波谐振器[J]. 半导体光电, 2013, 34(5): 755. WANG Chunmei, WEN Zhiyu, ZHANG Zuwei. Surface Acoustic Wave Resonator for Acousto-optic Frequency Shifter[J]. Semiconductor Optoelectronics, 2013, 34(5): 755.

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