光学 精密工程, 2013, 21 (10): 2495, 网络出版: 2013-11-01  

曲率半径的高精度测量及其不确定度

High-accuracy measurement for radius of curvature and its uncertainties
作者单位
中国科学院 长春光学精密机械与物理研究所 应用光学国家重点实验室,吉林 长春 130033
摘要
为了高精度测量光学元件的曲率半径,提出了一种利用反射式计算全息元件结合波长移相干涉测长技术测量光学球面曲率半径的方法。测试中,将反射式计算全息元件作为基准来标定所用标准镜头参考面的曲率半径,利用波长移相干涉技术测量干涉腔腔长,通过计算分析得到被测元件的曲率半径。文中描述了该方法的系统构成及其工作原理。结合实例,运用理论分析与软件仿真模拟分析了方法的测量不确定度。最后,利用实验室现有的商用波长移相干涉仪进行了实验验证。对一口径为100 mm的球面样品进行曲率半径的测量,得到的结果为157.108 3 mm; 利用接触式球径仪法对同一样品进行对比测量,结果显示相对误差小于0.02%。与其它目前已有的非接触式曲率半径测量方法相比,提出的方法具有误差源少、测量精度高、易于操作等优点。
Abstract
To measure the Radius of Curvature (ROC) of an optical element accurately, a novel interferometric testing approach by combining a Reflective-type Computer-generated-holography (RTCGH) and the wavelength phase-shifting technology was proposed to measure the ROCs of spherical optical surfaces. In measurement, the RTCGH was used as a reference to calibrate the ROC of the reference surface of a transmission sphere lens. Meanwhile, the lengths of interferometric cavities were measured by using wavelength phase-shifting. Then, the ROC to be measured could be calculated by above data. The system structure and the measuring principle of proposed method were described firstly. And then, combining with an example, the measuring uncertainty was analyzed in detail by the theoretical derivation and computer simulation. Finally, a verification experiment was performed by using a commercial wavelength phase-shifting interferometer in our laboratory. The ROC of an optical spherical sample with an aperture of 100 mm was tested by the method and the test result is 157.108 3 mm. For comparison and validation, the sample was also tested by a spherometer and the relative error is less than 0.02%. Compared with other non-contact ROC measurement methods, this testing way has advantages of less error sources, high measuring precision and convenient operation.

田志辉, 史振广, 刘伟奇, 杨怀江, 隋永新. 曲率半径的高精度测量及其不确定度[J]. 光学 精密工程, 2013, 21(10): 2495. TIAN Zhi-hui, SHI Zhen-guang, LIU Wei-qi, YANG Huai-jiang, SUI Yong-xin. High-accuracy measurement for radius of curvature and its uncertainties[J]. Optics and Precision Engineering, 2013, 21(10): 2495.

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