论述了光机热集成分析方法原理及接口多项式，并将其应用于某激光器光学系统进行光机热集成分析。该分析方法首先对光学系统进行热分析、结构有限元分析计算，获取激光辐照下光学元件表面的结构变形；其次，对有限元计算的光学元件变形结果数据进行Zernike面形拟合处理；最后将变形后的光学表面导入到通用光学设计分析软件，分析激光器光学系统变形后产生的各类光学像差。结果表明：利用集成分析方法能够分析光学元件产生热变形对激光系统成像质量造成的影响，为光学系统设计提供参考。

This article expatiates the theory of the thermal-structural-optical (TSO) integrated analysis and interface polynomial. The integrated analysis method was applied to the laser optical system. First of all, the thermal analysis and structure analysis of the optical system were analyzed by FEA software. Then the analyzed data were picked up and made Zernike surface fitting by software. Finally, the influence of the thermal deformation on the beam quality was analyzed by optical software. The results show that the integrated analysis can analyze the influence of optical mirror thermal deformation, and can guide optical system design in the laser optical system.