Chinese Optics Letters, 2013, 11 (11): 112302, Published Online: Nov. 25, 2013  

A two-dimensional high-frequency electrostatic microscanner Download: 664次

Author Affiliations
Abstract
The design of a two-dimensional high-frequency electrostatic microscanner is presented, and an improved method for routing isolation trenches is investigated to increase the reliability and mechanical stability of the resulting device. A sample device is fabricated and tested using an optimized micromachining process. Measurement results indicate that the sample device oscillates at inherent frequencies of 11586 and 2047 Hz around the two rotational axes, thereby generating maximum twisting angles of +(-)7.28o and +(-)5.63o, respectively, under two square waves of 40 V. These characteristics confirm the validity of our design and satisfy the requirements of a laser projector with VGA standards.

Yaobo Liu, Weizheng Yuan, Dayong Qiao, Meng Wu, Xuan Yang, Bin Lian. A two-dimensional high-frequency electrostatic microscanner[J]. Chinese Optics Letters, 2013, 11(11): 112302.

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!