针对激光微能量测量的问题, 提出一种激光微能量计标定新方法与装置。研究内容包括使用稳功率连续激光作为光源, 通过基于斩波的脉冲发生器组件产生微能量的脉冲激光,分别使用脉冲宽度测量组件与功率测量组件进行采集、软件分析, 计算微能量值及通过比对给出待标定能量计的修正系数,计算机自动控制。结果表明, 该方法获得的脉冲激光波形稳定, 脉冲宽度测量不确定度为0.08%, 激光功率测量不确定度为0.25%, 实现了对0.1 pJ～1 mJ的激光能量进行准确复现和传递。

Aiming at the problems of laser micro energy measurement, a new method and device were advanced. This device used a set of stable power continuous wave laser, a pulse laser generator based on chopping, a special data acquisition system that included a pulse width measuring module and a pulse power measuring module, and a control software that could calculate the value of micro energy and give the correction coefficient of the calibrate energy meter by means of contrast method. The experiment results show that the laser pulse generated by this device has stable waveform, pulse power and pulse width. The pulse width measurement uncertainty is 0.08%, the laser power measurement uncertainty is 0.25%. It implements accurate replication and transfer of the laser energy of 0.1 pJ~1 mJ.