为得到质量均衡的大功率激光束, 分别以条形和面阵半导体激光器为模型, 基于平行玻璃板对光束的偏移作用, 对准直后激光束进行分割和重排, 并在Zemax软件中进行了仿真。条形半导体激光器初始发散角为40°和10°, 整形前已准直光束快慢轴方向的光参数积分别为0.455 2 mm·mrad和20.484 mm·mrad, 光束质量相差较大, 整形后快慢轴方向光参数积分别为2.731 2 mm·mrad和3.414 0 mm·mrad, 实现了快慢轴方向光束质量均衡。利用平行玻璃板消除面阵半导体激光器中存在的“发光死区”, 整形后快慢轴方向光参数积分别为7.002 mm·mrad和10.242 mm·mrad, 整形系统耦合效率为90.13%。

In order to meet the needs of high power balanced laser beam, taking laser diode bar and stack as models, parallel glass plates were used in beam segmentation and rearrangement based on their beam displacement property. The system was simulated in Zemax. The initial divergence angels in diode laser bar were 40°and 10°. Before shaping, the beam parameter products of the collimated beam in fast axis and slow axis were 0.455 2 mm·mrad and 20.484 mm·mrad respectively, which had a great difference in beam quality. After shaping system, the beam parameter products in fast axis and slow axis were 2.731 2 mm·mrad and 3.414 0 mm·mrad respectively, with a better balanced performance. Similarly, parallel glass plates were used to eliminate the emitting dead zone of laser diode (LD) stack, increasing the beam energy density. After shaping system, the beam parameter products in fast axis and slow axis were 7.002 mm·mrad and 10.242 mm·mrad respectively, the coupling efficiency was 90.13%.