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离子束抛光轨迹段划分及进给速度求解

Path segment division and feed-rate solution in ion beam figuring

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摘要

针对光学元件高精度确定性加工,提出并实现了基于自适应步长算法实现离子束抛光轨迹段划分及进给速度求解。首先,对常规的等步长算法实现抛光轨迹段划分所存在的诸多问题进行了重点分析。其次,针对这些问题,提出了等效驻留时间轮廓计算方法及自适应步长算法,有效地避免了等步长法所存在的问题。然后,采用新算法对600 mm平面反射元件进行了实例计算,经加工后,元件98%口径内的面形精度峰谷(PV)值由110.22 nm(λ/5.7,λ=632.8 nm)收敛至4.81 nm(λ/131.6)。最后,基于自研的离子束抛光设备,实现了光学元件在100 mm口径内面形PV值小λ/70的超高面形精度。

Abstract

For high-precision deterministic processing, equal profile of dwell-time and adaptive step size algorithms are presented in this paper to solve processing path feed-rate. Firstly, we analyze the issues that exist in the conventional and other step algorithm. And then, for these issues, the adaptive step size algorithm is introduced. Finally, a Ф600 mm plane reflector element is taken to be an instance. The result shows that after four combinations of processing, the surface accuracy of peak-valley (PV) value and the root mean square (RMS) value was reduced to 4.81 nm (λ/131.6)and 0.495nm(λ/1278.4) from 110.22 nm (λ/5.7) and 13.998 nm (λ/45.2) ( λ=632.8 nm) respectively in the 98% caliber of the element. By using the new algorithm in our ion beam figuring machine, we obtained a reflector optical element whose PV value is less than λ/70 in Ф100 mm caliber.

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中图分类号:TH161

DOI:10.3788/hplpb20132512.3292

所属栏目:光学元件

基金项目:中国工程物理研究院科学技术发展基金项目(2009A0203012)

收稿日期:2013-07-22

修改稿日期:2013-08-18

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作者单位    点击查看

邓文辉:成都精密光学工程研究中心, 成都 610041
唐才学:成都精密光学工程研究中心, 成都 610041
陈贤华:成都精密光学工程研究中心, 成都 610041
王健:成都精密光学工程研究中心, 成都 610041
钟波:成都精密光学工程研究中心, 成都 610041

联系人作者:邓文辉(dengwenhui2004@aliyun.com)

备注:邓文辉(1985—),男,硕士,从事先进光学制造技术研究。

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引用该论文

Deng Wenhui,Tang Caixue,Chen Xianhua,Wang Jian,Zhong Bo. Path segment division and feed-rate solution in ion beam figuring[J]. High Power Laser and Particle Beams, 2013, 25(12): 3292-3296

邓文辉,唐才学,陈贤华,王健,钟波. 离子束抛光轨迹段划分及进给速度求解[J]. 强激光与粒子束, 2013, 25(12): 3292-3296

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