为提高稀土掺杂TiO2薄膜的上转换效率，采用溶胶-凝胶法和旋涂镀膜工艺制备了Yb3+-Er3+共掺杂SiO2/TiO2上转换光致发光薄膜，研究了SiO2对TiO2薄膜形貌以及发光性能的影响。利用FE-SEM观察了薄膜的表面形貌，利用分光光度计测试了薄膜在近红外光区域的透射率的变化，并用荧光光谱仪测试了薄膜的上转换发光光谱。结果表明：SiO2的掺杂导致TiO2颗粒尺寸显著减小，TiO2薄膜在近红外的透射率也有所下降。在980 nm红外光激发下，SiO2/TiO2薄膜在630~670 nm处获得了明显的上转换红光发射，在516~537 nm和537~570 nm处获得了较弱的上转换绿光发射。由上转换发光强度与激光泵浦功率的关系推知，绿色和红色上转换发光均为双光子吸收发射过程。

In order to improve the up-conversion efficiency of Yb3+-Er3+ co-doped TiO2 film, SiO2 was doped into the film which deposited on the glass substrate by sol-gel method and spin-coating technique. The effect of SiO2 on the films morphology and optical properties was researched. The morphology, near-infrared transmittance, and photoluminescence (PL) spectra of the film were tested and analyzed. The results show that the particle size of TiO2 decreases with the introduction of SiO2, but the property of near-infrared light transmittance decreases nearly keep steady. The film emits red light at 630~670 nm, weak green light at 516~537 nm and 537~570 nm under 980 nm excitation. In additional, the intensity of the up-conversion luminescence tends to be saturated with pump power increasing.