激光与光电子学进展, 2014, 51 (1): 011401, 网络出版: 2013-12-20
基于均匀度和平稳度的激光光束匀化性评价 
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Laser Beam Homogenization Assessment Based on Uniformity and Stationarity
激光光学 光束质量 激光光束匀化 衍射 均匀度 平稳度 laser optics beam quality laser beam homogenization diffraction uniformity stationarity
摘要
针对激光光束匀化的目的和特性，对现有的光束匀化性评价方法进行了分析，说明了这些方法的特点和存在的问题。提出了一种基于均匀度和平稳度的光束匀化性评价方法，该方法使用面阵CCD采集激光光强分布图像，通过图像处理分析光斑图像，采用均匀度和平稳度评价方法对光斑的整体能量分布和散斑进行评价。实验结果表明该评价方法可以较好地反映激光光束匀化状况。
Abstract
Aiming at the characteristics and purpose of beam homogenization, existing evaluating methods for beam uniformity are analyzed, and their disadvantages are discussed. An assessment method combining uniformity and stationarity is introduced. The laser intensity distribution is obtained by CCD and the laser spot is analyzed by image processing. Then we quantitatively analyze the energy distribution and speckle of laser spot with uniformity and stationarity. The result indicates that the testing system fully satisfies the demand of laser spot assessment.
李丽, 韩学勤, 赵士伟, 包鸿音, 王兴宾. 基于均匀度和平稳度的激光光束匀化性评价[J]. 激光与光电子学进展, 2014, 51(1): 011401. Li Li, Han Xueqin, Zhao shiwei, Bao Hongyin, Wang Xingbin. Laser Beam Homogenization Assessment Based on Uniformity and Stationarity[J]. Laser & Optoelectronics Progress, 2014, 51(1): 011401.
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