调整相干光束阵列中单元光束的线偏振方向可以得到近似的径向偏振光，但其特性与理想的径向偏振光存在差异。基于Richards-Wolf矢量衍射积分理论，利用数值方法对径向偏振相干光束阵列的深聚焦场进行了分析。研究了实际应用中较为关注的主要参数，即焦面上轴向偏振场及总场主瓣宽度、轴向偏振场的纯净度及产生效率。结果表明，与理想径向偏振光不同，径向偏振相干光束阵列的深聚焦场在焦面上会出现角向偏振分量。采用单环排布并使光束紧贴透镜瞳面边缘,可以产生质量更好的轴向偏振场。对于单环排布阵列，增多光束数目对轴向偏振场及总场主瓣宽度、轴向偏振场的纯度影响不大，但可以提高轴向偏振场的生成效率。

An effective radially polarized beam can be generated by coherently combined beams, each one with an appropriately oriented linear polarization, named radially polarized coherent beams array. However, the characteristic of the effective radially polarized beam is different from that of an ideal one. Based on the Richards-Wolf vector diffraction theory, numerical calculation is performed to analyze the intensity distribution at focal plane of a tightly focused radially polarized coherent beams array. The parameter, such as the full-width at half-maximum (FWHM) of the longitudinal and total field, the purity parameter and the generation efficiency of the longitudinal field are used to characterize the intensity distribution at focal plane. The results show that the azimuthally polarized field exists at focal plane for a tightly focused radially polarized coherent beams array, in contrast with an ideal radially polarized beam. To generate a radially polarized beam with better beam quality, the beamlets should be placed in one single ring and close to the pupil edge of the objective lens. When increasing the number of beams in the single-ring-shaped array, the FWHM of the longitudinal and total field and the purity parameter remain almost unchanged, but the generation efficiency of the longitudinal field is improved.