采用双波长固体激光器与碘分子饱和吸收稳频技术及环形腔谐振倍频技术相结合的方案研制了266 nm紫外激光波长标准。双波长固体激光器输出的532 nm激光入射到碘分子吸收稳频系统，稳频系统提供一个稳定的参考频率，如果532 nm激光的频率偏离该参考频率，稳频系统会产生反馈信号，该反馈信号通过伺服控制系统，调节单块激光器的腔长，使532 nm激光频率稳定在稳频系统提供的参考频率上。由于该532 nm激光是由激光谐振腔输出的1064 nm激光单次通过PPKTP倍频晶体得到，所以上述稳频过程同时也保证了1064 nm激光频率的稳定。单块双波长固体激光器输出的稳定的1064 nm激光经过两次二倍频产生频率稳定的266 nm紫外激光输出。

Dual-wavelength solid laser pumped NdYAG in miser configuration combined with the iodine absorption frequency stabilization technology and the external cavity-enhanced second harmonic generation technology is constructed to develop 266 nm ultraviolet (UV) laser wavelength standard device. The iodine absorption frequency stabilizing system read by a single dual-wavelength solid-state laser of 532 nm can give a reference frequency. When the output frequency of the 532 nm laser departs from the reference frequency, the cavity length of this laser will be controlled by a feedback signal from the iodine absorption frequency stabilizing system through a servo control system, so that the output frequency of the 532 nm can be locked to the reference frequency provided by the frequency stabilizing system. Because the laser at 532 nm is obtained from the frequency-doubled 1064 nm laser through PPKTP frequency doubling crystal, the frequency stability of the laser at 1064 nm can be assured. The single dual-wavelength solid-state laser of 1064 nm can provide a frequency stable UV laser output at 266 nm through double frequency doubling process.