提出了一种用衍射微透镜阵列对面阵半导体激光光束进行匀化的方法，解决了折射型微透镜阵列难于实现高填充因子、高精度面型的难题。基于标量衍射理论，设计了具有多阶相位结构的衍射微透镜阵列，推导了半导体激光从输入面到输出面的光场计算公式。数值模拟了非成像型微透镜阵列光束匀化系统，并对其进行了实验验证。当衍射微透镜的口径为0.125 mm，相对孔径为0.1，相位台阶数为8时，测得焦斑在快轴方向的不均匀性为12.34%，能量利用率为96.6%；慢轴方向的不均匀性为5.42%，能量利用率为95.74%。实验结果与理论模拟的结果吻合，验证了衍射微透镜阵列光束匀化系统模型的可行性。

In order to solve the problem that high fill factor and accurate surface shape of the refractive lens are difficult to realize, a new approach for homogenization of semiconductor laser planar array by using diffractive micro-lens array is proposed. Diffractive micro-lens array with phase steps based on the theory of scalar diffraction is designed. The equations of intensity distribution from the input plane to the output plane are derived. The numerical simulation and experiment of the non-imaging homogenization system of diffractive micro-lens array are carried out successfully. When the diameter of the micro-lens is 0.125 mm, relative aperture is 0.1 and phase step number is 8, in fast axis, the non-homogeneity is 12.34% and the energy efficiency is 96.6%; in slow axis, the non-homogeneity is 5.42% and the energy efficiency is 95.74%. The result of the experiment agrees well with the simulated result, proving the feasibility of the system of the diffractive micro-lens array for beam homogenization.