由于微纳米几何量计量很难以三维方式高精度地测量较大尺寸的器件，本文基于非硅MEMS工艺，开发了一种可用于微纳米尺度三维尺寸测量的电容式微触觉测头。利用电容频率测量法实现了微弱电容信号的采集。采用宏微结合驱动方式，设计了运动范围为25 mm×25 mm×10 mm，单轴12 μm范围内定位精度达1 nm的三维微位移平台。最后，对测头的测量范围、线性、迟滞及分辨力进行了测试。结果表明，测头的轴向测量范围为4.5 μm，横向测量范围大于5 μm，轴向分辨力优于10 nm，横向分辨力优于25 nm，线性较好。开发的测头结构简单、分辨力高、体积小、成本低，可集成到纳米测量定位平台(NMM)，完成具有大范围、亚微米或纳米级精度要求的测量任务。

It is difficult to measure large size components in higher precision and a 3D mode in the micro-nano geometrical measurement. Therefore, a high resolution, small sized capacitance sensor was fabricated based on non-silicon Micro-electronic-mechanical system(MEMS) technology. By designing the packaging and weak-capacitance acquisition system of the sensor, a capacitance-based micro tactile probe was developed to measure the 3D dimensions in micro/nano scale. Then, a 3D micro displacement platform was designed to test and calibrate the probe. The macro-micro combination drive mode was used to design the stage and its moving range is 25 mm×25 mm×10 mm and the uniaxial resolution in 12 μm range is 1 nm. Finally, the range, linearity, hysteresis and resolution of the probe were tested. Results show that the axial range is 4.5 μm, the lateral range is greater than 5 μm, the axial resolution and the lateral resolution of the probe are less than 10 nm and 25 nm,respectively. The experiments show that the probe has a good linearity and its advantages are simple structure, high resolution, small volume and low costs. The probe developed can be integrated to the nano measuring and positioning machine (NMM) to complete required measurement tasks in large ranges and sub-micrometer or nanometer level accuracy.