低损耗薄膜背散仪是测量高反射膜片背向散射光的一种非接触式测量仪器。由于背向散射光很弱,在仪器设计过程中,光传输时的能量损耗必须尽量少,而根据低损耗薄膜背散仪的设计要求,必须要实现s、p偏振光的测量。提出了两种实现s、p分量转换的方法,对两种方法能量损耗的大小进行比较,得出了能量损耗为零的s、p分量转换方法,以及转换部件的结构。

The lowloss instrument for measuring film backscattering is the noncontact instrument that can measure high reflection film backscattering. Because the back scattering light is very weak, in the process of designing the instrument, energy loss of light transmission must be as little as possible. The s, p polarization must be measured according to the design requirements of the lowloss instrument for measuring film backscattering. The conversion method of s, p polarization fitting the lowloss instrument for measuring film backscattering is proposed, and the device is designed, and the energy loss with these two methods of measuring the s, p polarization is also compared.