基于微分散射测量原理,设计了一种计算机自动控制微分测量系统,利用该系统最终能够得到散射样品表面的空间分布情况。该方法不仅能了解样片表面微观特征,而且采用了自控测量系统。微分散射自控测量系统能够减少操控繁琐的步骤并且重复性较好,经验证测量系统的最小可探测光功率可达1.628×10-6 mW,测量的最大误差在±1%范围内。

Based on the differential scattering measurement principle, a computer automatic control differential measurement system is designed, which could be used to get the scattering on the surface of the sample space distribution. The method, which uses the automatic measuring system, is able for us to understand the plate surface micro characteristics. Differential scattering control measurement system can reduce the manipulation of the cumbersome steps and it shows good repeatability. It is verified that the minimum detectable light power of the measurement system can reach 1.628×10-6 mW, and the biggest error within ±1%.