建立了以微机械陀螺驱动模态固有频率为虚拟温度传感器的温度补偿系统, 以实现对微机械陀螺标度因数和零偏的高精度温度补偿。研究了自主设计的微机械陀螺的驱动模态固有频率的温度特性, 通过实验手段获得了频率的温度系数为(-26.9±2.03)×10-6 ℃, 且温度测量精度1 s平均时为0.075 ℃, 20 s平均时为0.004 ℃。在分析微机械陀螺标度因数和零偏温度特性的基础上, 提出了一种二阶温度补偿方案, 并给出了补偿原理和算法示意图。最后, 利用驱动模态固有频率对标度因数和零偏进行了温度自补偿。实验结果表明, 在-40 ℃到60 ℃, 标度因数的最大相对变化量从补偿前的2.1%下降到了0.05%; 零偏的最大相对变化量从补偿前的8.9%下降到了0.1%; 室温下2 h的零偏实验表明, 温度补偿后微机械陀螺的零偏不稳定性由4.1(°)/h降到了0.42(°)/h, 满足了微机械陀螺温度补偿的高精度要求。

A temperature compensation system was build by using the drive-mode natural frequency as a virtual temperature sensor to achieve high-precision temperature compensation for the scale factor and zero bias of a micro-machined gyroscope. The temperature characteristics of the drive-mode natural frequency were explore, and its coefficient (-26.9±2.03)×10-6 ℃ was obtained. The frequency stability was translated to temperature precision to be 0.075 ℃ at 1 s average and 0.004 ℃ at 20 s average. On the basis of analysis of the temperature characteristics of scale factor and zero bias, a second-order temperature compensation scheme was proposed, and the principle and block-diagram of compensation algorithm were given. Finally, the scale factor and zero bias were compensated using the drive-mode natural frequency. The experiment results show that the maximum relative change of scale factor is reduced from 2.1% to 0.05% and that of zero bias is reduced from 8.9% to 0.1% at -40 ℃ to 60 ℃. The zero bias experiment at room temperature for 2 hours shows that the bias nonstability is reduced from 4.1(°)/h to 0.42(°)/h after compensation. These results satisfy the demand of micro-machined gyroscopes for high-precision temperature compensation.