采用具有良好光学特性的Cytop作为绝缘疏水层,探索了电润湿显示单元器件的制备工艺。采用了氧等离子处理的方法解决Cytop优良的疏水性与光刻工艺的不兼容性,实现了单个显示像素的可控收缩与恢复。在此基础上制备了面积为5 cm×5 cm的透射式和反射式的单色显示单元,表现出良好的显示效果,为下一步具有实用化的电润湿显示器件的制备奠定了坚实的基础。

Electrowetting display (EWD) was fabricated by using cytop, which， as the hydrophobic dielectric layer，features good optical properties. Plasma treatment was used to solve the contradictory between superhydrophobic of Cytop surface and lithography process. Controllable contraction and recovery of single EWD pixle was realized. Furthermore, 5cm×5cm single corlour reflective and transmissive EWD arrays have been fabricated successfully, which show nice performance. Thus，a good foundation is laid for the fabrication of practical electrowetting display device.