将薄膜太阳能电池的氢化非晶硅吸收层雕刻成一维光栅结构,以此结构来增加氢化非晶硅吸收层对太阳光的捕获能力。利用严格耦合波方法,对电池吸收层吸收效率进行模拟计算,得到光栅结构吸收层在300～700 nm入射波长范围内,吸收效率明显高于平坦吸收层电池的效率,绝对效率最大可提高58.3％。其中吸收层厚度为0.16 μm的光栅电池结构在650～700 nm处有较高的吸收效率,此波段内平均吸收效率可达40％,比平坦结构结构平均吸收效率提高30％以上。最后利用时域有限差分法对吸收层电场分布进行模拟,与平坦结构吸收层的电场分布对比,可以直观的看出入射光在光栅吸收层的吸收增强效应。

In hydrogenated amorphous silicon thin film solar cell, one-dimensional grating structure is inscribed into the absorbing layer, so as to increase the capturing capacity of the solar cell. By using rigorous coupled wave analysis method to calculate the absorption efficiency, it is concluded that the absorption efficiency of grating structure is significantly higher than that of normal cells covering incident wavelength range of 300～700 nm. The maximum efficiency is up to 58.3% .For the thickness of absorbing layer is 0.16 μm, the efficiency has a high value in the range of 650～750 nm, and the average efficiency can reach 40% with a 30% increases than that of other grating structures. By using finite element method to model the field distribution in the cells, the absorption enhancement effect can be obviously observed inside the cells.