强激光与粒子束, 2014, 26 (1): 011006, 网络出版: 2014-01-17   

GaSb基激光器腔面膜的材料选取及膜系设计

Material selection and coating system design of GaSb-based laser cavity mask
作者单位
长春理工大学 高功率半导体激光国家重点实验室, 长春 130022
摘要
为了提高GaSb基激光器腔面膜的反射率,根据有关薄膜设计理论并借助薄膜设计软件,设计出激光器腔面膜膜系。使高反膜在2.0~3.5 μm波段的理论反射率高于95%;增透膜在波长为2.5 μm处的理论透射率高于99%。并经过反复实验操作比较了实验与理论设计反射率曲线,结果表明,实验所得反射率能达到实际应用的要求。除此之外,还通过比较各种材料的特性,讨论了薄膜材料的选取。
Abstract
In order to improve the reflectance of the GaSb-based laser cavity mask, the laser cavity film was designed in accordance with the relevant film design theory and by film-design software. The reflectance of the high anti-reflection film was higher than 95% in the band of 2-3.5 μm; the transmittance of the antireflective film was higher than 99% at the wavelength of 2.5 μm. The theoretical and experimental reflectance curves of high reflector and the single layer antireflection coating were compared through repeated experiments. Though the experimental results did not reach the theoretical value, they could meet the requirements of the application. The selection of the film materials was discussed by comparison of various material properties.

高婷, 曲轶, 徐正文, 王鑫, 李再金. GaSb基激光器腔面膜的材料选取及膜系设计[J]. 强激光与粒子束, 2014, 26(1): 011006. Gao Ting, Qu Yi, Xu Zhengwen, Wang Xin, Li Zaijin. Material selection and coating system design of GaSb-based laser cavity mask[J]. High Power Laser and Particle Beams, 2014, 26(1): 011006.

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