运用X射线衍射仪和拉曼光谱仪, 测量了物理气相输运(PVT)方法生长的AlN多晶材料的X射线衍射和常温拉曼光谱。常温拉曼光谱研究了晶界、晶面方向与拉曼频率的关系, 观察到了E和E峰位基本不随测量位置变化, 与晶界无关, 但是E1(TO), A1(LO)和Quasi－LO声子峰位却明显与晶界有关, 为研究晶粒间、晶粒内应力提供了有效手段。

X-ray diffraction and Raman spectrum have been measured to study poly-crystalline AlN. The relationship between raman frequency and crystal boundary and face has been studied by raman scattering at room temperature. Peak positions of Raman frequencies E1(TO), A1(LO) and Quasi－LO except Eand E were related with crystal boundaries and shifted with measurement position.