红外技术, 2014, 36 (1): 73, 网络出版: 2014-02-26
碲镉汞长波探测器暗电流仿真分析
Simulation Analysis of Dark Current in Long Wavelength Infrared HgCdTe Photodiodes
摘要
针对 n-on-p型长波 Hg1-xCdxTe红外探测器的暗电流进行建模分析,分析了不同机制对暗电流的影响,仿真分析结果和实际结果能够较好地匹配。得出探测器的工作状态暗电流 Idark=9×10-10 A,工作电阻 Rr=109.,品质因子 R0A=20.cm2。从仿真分析结果得出,在现有工艺下, Shockley-Read-Hall(SRH)复合和表面漏电是影响暗电流的最主要的非本征因素,其中 SRH复合速率为 2×1016 /s.cm3,当表面态到达 1×1012 cm-2,器件会出现严重的表面沟道。
Abstract
The dark current of n-on-p type LWIR based on Hg1-xCdxTe has been simulated in this paper. Different mechanisms influences dark current are also analyzed. The results of the simulation match well with the experiments. The photodetector has a dark current Idark=9×1010 A,working resistance Rr=109., and quality factors R0A=20.cm2. According to the results,with the present technique,Shockley-Read-Hall (SRH) recombination and surface leakage current are the most influential extrinsic factors to the dark current. The recombination rate of SRH can be as high as 2×1016 /s.cm3. And the device will have a severe surface channel when the surface states reaches 1×1012 cm-2.
李龙, 孙浩, 朱西安. 碲镉汞长波探测器暗电流仿真分析[J]. 红外技术, 2014, 36(1): 73. LI Long, SUN Hao, ZHU Xian. Simulation Analysis of Dark Current in Long Wavelength Infrared HgCdTe Photodiodes[J]. Infrared Technology, 2014, 36(1): 73.