提出一种制作凹形聚二甲基硅氧烷(PDMS)微透镜阵列的方法。用数字微镜器件(DMD)代替物理掩模，建立数字灰阶无掩模光刻系统，在光刻胶上制作正方形基底凸形微透镜阵列，以此阵列为母板，采用复制方法，制作了高填充因子的正方形基底凹形PDMS微透镜阵列。实验和测试结果表明：数字灰阶无掩模光刻系统制作的微透镜阵列表面光滑，形貌良好；复制的PDMS微透镜阵列边缘清晰，表面光滑，焦面光斑光强均匀。为制作凹形微透镜阵列提供了一条制作简单、效率高、成本低、可大规模制作的新途径。

We present a method for fabrication of concave polydimethylsiloxane (PDMS ) microlens array. A digital maskless grayscale lithography system based on digital micromirror device (DMD) is established. Microlens array with a square base is fabricated in photoresist by the system, which is used as replication model. By replica molding technique, a concave PDMS microlens array with a square base is fabricated. Experimental and test results show that the edges of PDMS microlenses are clear, the surfaces are smooth, and the spotlight performances are favorable. The light intensities which transit the microlens array are uniform. The approach described in the paper is a new method for fabrication of concave PDMS microlens, which has advantages of facile, effective, low cost, and arrays can be replicated by larger scale.