光学学报, 2014, 34 (3): 0312006, 网络出版: 2014-02-28
基于双波长数字全息术的微光学元件折射率分布及面形测量
Refractive Index Distribution and Surface Profile Measurement of Micro-Optics Based on Dual Wavelength Digital Holography
全息 双波长数字全息术 微光学元件 折射率匹配液 折射率分布 面形 holography dual wavelength digital holography micro-optical elements refractive index matching liquid refractive index distribution surface profile
摘要
提出了一种测量微光学元件的折射率分布及面形的方法。该方法基于双波长数字全息术，将微光学元件浸入折射率匹配液降低通过微光学元件的透射光波频率，获取微光学元件在两个不同波长照明光波下的数字全息图，并根据两个波长下的相位分布，计算出微光学元件的折射率分布，利用得到的折射率分布获取微光学元件的面形。理论分析及实验结果证明了所提方法的可行性。
Abstract
A method based on dual wavelength digital holography is proposed to measure the refractive index distribution and surface profile of micro-optics elements. Micro-optics elements are immersed in refractive index matching liquid to reduce the frequency of transmission light. The digital holograms of micro-optics elements are obtained under illumination of two different wavelengths, the refractive index distribution of micro-optics elements can be obtained according to phase distribution under two wavelengths. Surface profile of micro-optics elements can be calculated based on the refractive index distribution. Theoretical analysis and optical experimental results are performed to demonstrate its validity.
邓丽军, 杨勇, 石炳川, 马忠洪, 盖琦, 翟宏琛. 基于双波长数字全息术的微光学元件折射率分布及面形测量[J]. 光学学报, 2014, 34(3): 0312006. Deng Lijun, Yang Yong, Shi Bingchuan, Ma Zhonghong, Ge Qi, Zhai Hongchen. Refractive Index Distribution and Surface Profile Measurement of Micro-Optics Based on Dual Wavelength Digital Holography[J]. Acta Optica Sinica, 2014, 34(3): 0312006.
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