设计了一种以平行板铰链机构进行导向, 以桥式机构进行位移放大的新型压电陶瓷驱动微定位平台。应用弹性力学和材料力学理论建立该平台的桥式放大机构和平行板铰链机构的理论模型, 分析了平台的驱动力、输出位移、刚度和固有频率, 并运用Matlab软件优化了桥式机构铰链长度、厚度, 平行板铰链长度及厚度等几何参数, 获得了微定位平台的最优值。对优化后的结果进行了有限元仿真, 并搭建了测试系统对平台性能进行了测试。测试结果显示, 理论分析与实验结果的最大误差为9.8%, 有限元分析与实验结果的最大误差为4.2%, 得到的结果验证了理论分析和有限元分析的正确性, 实现了平台体积小, 放大倍数高, 位移输出大的设计目标。

A micro-positioning stage driven by a piezoelectric ceramic is developed, which adopts a bridge-type flexure hinge mechanism to realize displacement amplification and uses a parallel board hinge mechanism to guide. Based on elastic mechanics and material mechanics, the theoretical models of bridge-type flexure hinge and parallel board hinge mechanisms are established and the driving force, output displacement, stiffness and natural frequency of the stage are analyzed. The Matlab software is used to optimize the geometric parameters, including the length and thickness of the bridge-type flexure hinge, and those of the parallel board hinge, By which the optimized parameters are obtained. The micro-positioning stage after optimization is simulated by Finite Element Analysis(FEA) and a test system is constructed to measure the micro-positioning stage. The experimental results show that the largest error between theoretical analysis and experimental result is 9.8%, and the largest error between FEA and experimental result is 4.2%, which verifies the accuracy of theoretical analysis and FEA, and achieves the stage design objective in smaller volumes, higher amplification and large displacement outputs.