光学 精密工程, 2014, 22 (2): 376, 网络出版: 2014-03-03   

微磨削锥塔结构光滑表面的自适应方向检测与微加工精度

Adaptive-orientation measurement and micro-machining accuracy of micro-ground pyramid-structured smooth surface
作者单位
华南理工大学 机械与汽车工程学院, 广东 广州 510640
摘要
用白光干涉检测(WLI)法检测微结构表面形貌时, 其光滑结构面和边角数据很容易丢失, 因此本文提出了自适应方向WLI检测法。该方法分别沿着每个微斜面法向进行自适应方向检测, 评价分析其面形、特征轮廓和特征点的加工精度。首先, 采用#3000金刚石砂轮微细尖端在Si表面加工出高度为50 μm、宽度为56 μm且光滑的微锥塔结构。然后, 利用四次检测点云对微磨削表面进行拼接与重建。最后, 分析面形误差、特征轮廓误差和特征点误差。实验显示: 自适应方向WLI检测可以重构出完整的微锥塔结构表面, 微磨削的面形误差为5.3 μm, 表明该微磨削技术可以确保微锥塔结构光滑Si表面的加工精度。但是, 对微锥塔结构表面特征轮廓误差及特征点误差的评价表明, 特征轮廓误差高达7.7 μm, 而特征点误差约为15 μm, 约为面形误差的3倍。分析认为这些误差是由微金刚石砂轮V形尖端磨钝及微磨粒钝化造成的。
Abstract
When a White Light Interferometry (WLI) is used to measure the micro-structured surface topography, the measured points on smooth micro-structured surfaces and edges are easy to lose. Therefore, an adaptive-orientation WLI was proposed. The method measured each steep surface along its near normal-orientation for the evaluation of its surface shape, feature profile and micro-machining accuracy. First, a #3000 diamond wheel V-tip was employed to fabricate a micro-pyramid-structure Si surface with a depth of 50 μm and a width of 56 μm. Then, four adaptive-orientation measured point clouds were used to splice and reconstruct whole micro-ground surface. Finally, the micro-ground form error, feature profile error and the feature point error were investigated. Experiments show that the adaptive-orientation measurement can reconstruct integrated micro-pyramid-structured surface and the form error is 5.3 μm, which means that the micro-grinding may assure the machining accuracy of micro-pyramid-structured Si surface. In contrast, the evaluation for the feature profiles and feature points of a micro-pyramid-structure indicates that the feature profile error reaches 7.7 μm, and the feature point error is about 15 μm, which is about 3 times of its form error. It suggests that these errors come from the passivations of diamond wheel V-tip and micro grains.

谢晋, 刘旭冉, 吴可可, 李萍, 卢泳贤. 微磨削锥塔结构光滑表面的自适应方向检测与微加工精度[J]. 光学 精密工程, 2014, 22(2): 376. XIE Jin, LIU Xu-ran, WU Ke-ke, LI Ping, LU Yong-xian. Adaptive-orientation measurement and micro-machining accuracy of micro-ground pyramid-structured smooth surface[J]. Optics and Precision Engineering, 2014, 22(2): 376.

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