半导体光电, 2014, 35 (1): 65, 网络出版: 2014-03-11
硬脂酸质子交换X切LiNbO3光波导的制备技术研究
Fabrication of Proton-exchanged X-cut LiNbO3 Optical Waveguide Using Stearic Acid
摘要
利用无毒、无腐蚀性的硬脂酸作为交换质子源, 研究了在X切LiNbO3晶片上制作单模条形光波导的工艺技术。通过对平板光波导的交换及退火特性的研究, 确定了获得单模条形光波导的工艺参数, 制作并测试了条宽不等的X切Y传LiNbO3单模条形光波导。结果表明该工艺条件下制作的条宽为6μm的单模波导实现了小于1dB/cm的传输损耗, 为采用硬脂酸作为交换质子源研制X切Y传LiNbO3集成光波导器件奠定了基础。
Abstract
Investigated was the technology for fabricating single mode optical channel waveguide on X-cut LiNbO3 substrate by using non-toxic and non-corrosive stearic acid melts. The technical conditions for realizing such an optical channel waveguide were obtained by investigating exchange conditions and annealing properties of a planar waveguide. And the waveguides along Y direction with different channel width were fabricated on X-cut LiNbO3 substrate. The measurement results show that the propagation loss less than 1dB/cm is realized for the single mode waveguide with the width of 6μm.
陈硕, 刘占元, 刘鹏飞, 陈开鑫. 硬脂酸质子交换X切LiNbO3光波导的制备技术研究[J]. 半导体光电, 2014, 35(1): 65. CHEN Shuo, LIU Zhanyuan, LIU Pengfei, CHEN Kaixin. Fabrication of Proton-exchanged X-cut LiNbO3 Optical Waveguide Using Stearic Acid[J]. Semiconductor Optoelectronics, 2014, 35(1): 65.
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