利用溶胶-凝胶技术与电子束蒸镀相结合的方法在常温下制备了叠层V2O5/Ag/V2O5(VAV)透明导电薄膜, 研究了各层薄膜厚度对叠层结构光电特性的影响。用原子力显微镜、紫外-可见光分光光度计、四探针电阻仪及开尔文探针对样品的表面形貌、光电性能及功函数等性质进行了表征。实验结果表明, 该薄膜具有良好的光学和电学性质, 可见光(380~780 nm)平均透过率达75%,迁移率为16.89 cm2/(V·s), 载流子浓度为－1.043×1022 cm-3, 方块电阻值为15.1 Ω/□, 功函数为5.17 eV。该制备方法降低了V2O5薄膜的工艺制备难度, 为该材料在太阳能电池中的应用创造了良好的前期基础。

V2O5/Ag/V2O5 (VAV) multi-layer transparent conductive film was prepared by the combination of sol-gel technique and electron beam evaporation at room temperature. The effects of each layers thickness on photoelectrical properties and surface appearance of multi-layers were studied by atomic force microscope, UV-Vis spectrophotometer, four-point probe method and Kelvin probe. The experiments results reveal that the multi-layer transparent conductive film has desirable photo-electrical properties with average transmission of 75%(380~780 nm), mobility of 16.89 cm2/(V·s), carrier concentration of -1.043×1022 cm-3, the sheet resistance of 15.1 Ω/□, and work function of 5.17 eV. This method reduces the difficulty of fabricating V2O5/Ag/V2O5 multi-layer films, providing a kind of promising transparent electrode for solar cells.