在光敏面上镀制荧光薄膜将紫外光转变为可见光, 是提高CCD和CMOS图像传感器紫外响应灵敏度的一种有效方法。 针对荧光薄膜入射界面的散射和反射损耗降低荧光发光强度的分析, 研究在荧光薄膜上镀制增透膜和阻隔膜的灵敏度增强特性。 采用真空热阻蒸发的镀膜方法分别制备了单层Lumogen荧光薄膜和MgF2/Lumogen复合膜。 利用原子力显微镜, 紫外可见近红外分光光度计, 荧光光谱仪对两种样品的表面粗糙度, 漫反射和透射光谱以及荧光发光光谱分别进行对比测试分析。 结果表明: MgF2保护层降低了表面粗糙度, 减小了入射界面的漫反射损耗, 对500～700 nm的可见波段具有明显增透作用, 也增强了Lumogen薄膜对紫外波段受激发射的荧光强度; 同时, MgF2薄膜的抗损伤及水汽隔离性能对荧光薄膜紫外响应能力具有保护作用, 为延长紫外CCD薄膜及器件的工作寿命提供了有效手段。

A low cost and less complicated expansion approach of wavelength responses with a Lumogen phosphor coating was adopted, as they increased the quantum efficiency of CCD and CMOS detectors in ultra-violet by absorbing UV light and then re-emitting visible light. In this paper, the sensitivity enhancement of fluorescence coatings was studied by adding an anti-reflection film or barrier film to reduce the loss of the scattering and reflection on the incident interface. The Lumogen and MgF2/Lumogen film were deposited on quartz glasses by physical vacuum deposition. The surface morphology, transmittance spectrum, reflectance spectrum and fluorescence emission spectrum were obtained by atomic force microscope (AFM), spectrophotometer and fluorescence spectrometer, respectively. The results indicated that MgF2 film had obvious positive effect on reducing scattering and reflection loss in 500～700 nm, and enhancing the absorption of Lumogen coating in ultraviolet spectrum. Meanwhile, the fluorescent emission intensity had a substantial increase by smoothing the film surface and thus reducing the light scattering. At the same time, the MgF2 layer could protect Lumogen coating from damaging and contamination, which give a prolong lifetime of the UV- responsive CCD sensors with fluorescent coatings.