通过实例研究和近期报道的文献，论述了热驱动微光学的研究进展。驱动器主要通过应用在液体和液气界面的压力来调控光学微流体，包括微镜片和薄膜微透镜，热驱动器利用芯片上的温度变化产生所需要的压力差，从而对微透镜进行调控。同时还讨论了用于微光学结构的各种设备、结构、液体和膜材料，并提供了典型操作特性。

We discuss the development of thermo-pneumatic micro-optics and illustrate this progress using examples from our own research as well as recent literature. Pneumatic actuation is used for tuning micro-fluidics based optics, including micromirrors and membrane microlenses, which rely on pressure applied to liquids or liquid/gas interfaces for operation. Thermo-pneumatic actuation uses on-chip temperature changes to generate the requisite pressure differences. We discuss the variety of devices, structures, liquids and membrane materials used for these micro-optical structures and provide typical operating characteristics.