Chinese Optics Letters, 2014, 12 (s1): S12203, Published Online: Jul. 31, 2014   

Experimental study of fabricating SiC mirror in full aperture with optimized fixed abrasive polishing pad Download: 578次

Author Affiliations
Abstract
The removal function test is carried out on the earlier round-pellet polishing pad. The concept of filling factor is introduced to evaluate the removal function obtained from the experiments mentioned in the paper. To improve the filling factor and characteristics of the polishing pad, the pad structure is optimized according to the experimental results of the round-pellet pad. The removal function of the new polishing pad is simulated with MATLAB. The stability experiment is carried out in full aperture at the same time. The fixed abrasive and the slurry abrasive polishing experiment both are performed under the same conditions. Finally, the structural similarity index is introduced to evaluate the similarity between simulations and experiments. The best structural similarity index of multi-square-pellet pad is 0.4257. The comparison results are acceptable and positive. The optimized fixed abrasive polishing pad is proved to be highly promising for large-diameter SiC mirror fabrication.

Xu Wang, Feng Zhang. Experimental study of fabricating SiC mirror in full aperture with optimized fixed abrasive polishing pad[J]. Chinese Optics Letters, 2014, 12(s1): S12203.

本文已被 1 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!