提出了一种新的制造微透镜的制作方法。该方法基于CO2激光与玻璃材料的热透镜效应, 在玻璃基片上制作微透镜阵列, 是一种低成本、高效率的制备玻璃微透镜阵列的方法。采用CO2激光照射在模板上, 模板上通光部分为圆孔阵列, 利用金属孔阵模板进行选择性投影扫描加工, 通过实验数据分析, 合理的控制离焦距离, 激光功率和辐照时间,可以制造微透镜阵列。最后用共聚焦显微镜及光纤探针扫描仪对微透镜的轮廓及聚焦光斑进行了检测, 样品的轮廓曲线较为平滑、对称, 且具有较好的聚光能力, 证实了该方法的可行性与可靠性。

This paper presents a new method to fabricate a micro-lens array by using CO2laser. The method of micro-lens array fabrication on a glass slice with a CO2 laseris based on the thermal lensing effect. By using this method, a low cost and highly efficient way to fabricate a micro-lens array on a glass slice could be obtained. After laser scanning on a metal mask which has a circular aperture array, a micro-lens array could be successfully formed. Then series of experimental data were analyzed after optical detections. Therefore the control of the defocus distance, laser power and irradiation time could be setted up reasonably. The contour and its focused spots of the sample micro-lens array were finally detected by a confocal microscopy and a spot probe scanning microscope respectively. The images of the detected contour of the micro-lens array are of well smoothness and symmetry. This method is thus confirmed to be a feasible and reliable method to fabricate micro-lens array.