中国激光, 2014, 41 (s1): s116003, 网络出版: 2014-07-03
一种CCD器件响应度非均匀性校准装置研制
A Calibration Equipment of Responsivity Non-Unmiformity for Charge Coupled Devices
光学器件 非均匀性 均匀光辐射法 测量不确定度 optical devices CCD CCD non-unmiformity uniform radiation measurement uncertainty
摘要
介绍了一种可见光CCD器件响应度非均匀性校准方法,并对校准装置进行了测量不确定度评定。得到可见光CCD器件响应度非均匀性扩展不确定度为0.46%,辐射可调均匀光源的输出口直径可达200 mm,并选用CCD器件对测量装置的测量不确定度进行了验证,通过验证可知测量CCD器件的重复性为0.003%和0.005%,远小于测量装置的合成测量不确定度0.23%,说明校准装置的测量不确定度是合理的。
Abstract
A method of calibrating responsivity nonunmiformity for visible charge coupled devices (CCD) is presented, and the measurement uncertainty for the calibration equipment is evaluated. The expanded uncertainty of responsivity non-unmiformity for visible CCD is 0.46%, and the output diameter of the radiation adjustable uniform light source is 200 mm. The measurement uncertainty of the calibration equipment is verified use CCD, the measurement repeatability of the CCD is 0.003% and 0.005% less than 0.23% of the total uncertainty. The measurement repeatability of calibration equipment is reasonable. The calibration equipment can meet the calibration demand for big area array image device, meanwhile can provides a very useful reference for big area array image device factory and customers.
刘红元, 王恒飞, 马书民, 应承平, 吴斌, 王洪超. 一种CCD器件响应度非均匀性校准装置研制[J]. 中国激光, 2014, 41(s1): s116003. Liu Hongyuan, Wang Hengfei, Ma Shumin, Ying Chengping, Wu Bin, Wang Hongchao. A Calibration Equipment of Responsivity Non-Unmiformity for Charge Coupled Devices[J]. Chinese Journal of Lasers, 2014, 41(s1): s116003.