在简要分析二维位敏探测器工作原理的基础上, 详细介绍了一种大面积枕型二维位敏探测器的结构设计和制作工艺。对器件响应度、暗电流、位置分辨率, 以及位置线性度等性能参数进行了分析。测试结果显示, 器件在峰值波长λp=930nm处的响应度达0.63A/W, 暗电流小于300nA(VR=10V), 位置分辨率小于10μm, 位置非线性度小于5%。

Based on introducing the principles of 2D position sensitive detector, the structural design and production process of large area pillow-shaped 2D position sensitive detector were introduced in detail. Furthermore, the parameters such as spectral responsivity, dark current, position resolution and position linearity were analyzed. Test results show that the peak responsivity reaches 0.63A/W at 930nm, the dark current is less than 300nA under 10V reverse bias, and the position resolution and linearity are better than 10μm and 5% respectively.