简要介绍了基于故障物理的MEMS(Micro-Electro-Mechanical Systems, 微电子机械系统)可靠性研究方法和技术路线。以电容式RF MEMS开关为例, 介绍了基于故障物理的MEMS可靠性研究方法的主要步骤, 包括: 采用多物理场3D有限元模型研究MEMS器件的行为, 应用MEMS器件的行为模型和失效物理试验技术研究其失效机理, 引入优值建立了通用的MEMS器件失效预测模型。

Briefly described are reliability research methods and roadmap of the PoF-based MEMS (Micro-electro-mechanical systems). Using the capacitive RF MEMS switch as an example, main steps of the method are described, including the flowing steps: to study the MEMS devicesbehaviors with the 3D multi-physics finite element models, to study the MEMS devices failure mechanism with its behavior model and the PoF experiment technology, and to establish a common MEMS device failure prediction model with some certain introduced figure of merit.