应用光学, 2014, 35 (3): 446, 网络出版: 2014-06-03  

基于俯视SEM图像的矩形光栅占宽比检测方法

Measurement method for duty cycles of rectangular gratings based on top-down SEM images
作者单位
中国科学技术大学 国家同步辐射实验室,安徽 合肥 230029
摘要
提出了一种利用俯视SEM图像检测矩形光栅占宽比的新方法。对目标检测图像进行灰度轮廓预处理,接着进行基于动态规划和最小二乘样条逼近的边缘检测,最后按照设定的量化评价标准,计算出目标区域内的光栅占宽比的平均值和标准偏差。使用该方法不仅可以快速准确地计算出目标区域内的光栅占宽比和量化评价占宽比空间分布均匀性,也避免了具有破坏性的制样过程,弥补了传统断面测量方法的不足。编写了用于矩形光栅占宽比检测的图像处理软件GradUI。使用此软件对一组1 200 线/mm矩形光栅的俯视SEM图像进行检测分析,发现平均占宽比与灰度轮廓估算值的均方根偏差为0.017 3。结果表明,基于俯视SEM图像的矩形光栅占宽比检测方法是有效可行的,同时,也验证了软件的可靠性。
Abstract
A novel method to measure duty cycles of rectangular gratings and evaluate the spatial uniformity of duty cycles was presented on the basis of top-down scanning electron microscope(SEM) images. This method first conducts image grayscale profile preprocessing on target images, then performs border detection based on dynamic programming and least-squares spline approximation, and finally computes the mean and standard deviations of duty cycles in the target area in light of the provided evaluation standards. Using this method, we can not only quickly and accurately measure grating duty cycles and perform quantitative analysis on the spatial uniformity of duty cycles, but also avoid damaging sample preparation process, which greatly make up the deficiency of traditional method. A top-down SEM image processing software, GradUI, for detecting duty cycles of rectangular gratings was developed. The top-down SEM images of several 1 200 lines/mm self-made gratings were processed with the software, and the root-mean-square deviation of the average duty cycle and the estimated value was 0.017 3. The results show that the approach to calculate duty cycles based on top-down SEM images is feasible and of high efficiency, and the software is robust.

吴丽翔, 刘颖, 饶欢乐, 邱克强, 付绍军. 基于俯视SEM图像的矩形光栅占宽比检测方法[J]. 应用光学, 2014, 35(3): 446. WU Li-xiang, LIU Ying, RAO Huan-le, QIU Ke-qiang, FU Shao-jun. Measurement method for duty cycles of rectangular gratings based on top-down SEM images[J]. Journal of Applied Optics, 2014, 35(3): 446.

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!