强激光与粒子束, 2014, 26 (5): 051010, 网络出版: 2014-06-03   

线性色散设计的光谱共焦测量技术

Chromatic confocal microscope with linear dispersive objective
作者单位
中国工程物理研究院 机械制造工艺研究所, 四川 绵阳 621900
摘要
研制了高精度的光谱共焦位移测量系统并完成相关测试。基于色差理论和材料优化选择设计一种色差与波长成线性关系的色散物镜,有助于平衡系统在全测量范围的灵敏度。理论分析了系统参数对系统的影响规律,计算了针孔尺寸与系统的分辨率和信噪比的关系,给出了参数优化结果。利用设计的线性色散物镜和参数优化结果,构建了光谱共焦测量系统,完成了系统的校准、测试和应用研究。结果表明,系统的轴向测量范围达到1 mm,分辨力优于0.5 μm,全程测量误差小于2 μm,符合设计要求。
Abstract
We built a chromatic confocal microscope for micro metrology. Based on dispersive aberration principle and optimization of lens glasses, a dispersive objective was designed, of which the dispersive aberration was linear to wavelength. The linear dispersive aberration could help to balance the sensitivity of chromatic confocal microscope. Designed dispersive objective is of large dispersive aberration, small longitudinal aberration and long working distance. Influence of system parameters on optical sectioning was analyzed and simulation results were exhibited. Chromatic confocal microscope was built, calibrated and tested. Experimental results show that the measuring range is 1 mm, the resolution is better than 0.5 μm and the measuring error in full range is less than 2 μm. To test the performance of microscope, profile of standard height was scanned and thickness of transparent plate was measured.

刘乾, 王洋, 杨维川, 袁道成. 线性色散设计的光谱共焦测量技术[J]. 强激光与粒子束, 2014, 26(5): 051010. Liu Qian, Wang Yang, Yang Weichuan, Yuan Daocheng. Chromatic confocal microscope with linear dispersive objective[J]. High Power Laser and Particle Beams, 2014, 26(5): 051010.

本文已被 2 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!