基于远紫外（FUV）成像光谱仪对所用光子计数成像探测器高计数率、高空间分辨率的要求，研制出使用感应电荷位置灵敏阳极的FUV波段二维光子计数成像探测器原理样机，该探测器主要由工作在脉冲计数模式下的微通道板（MCP）堆、楔条形（WSA）感应位敏阳极及相关的模拟和数据处理电路组成。感应电荷WSA阳极探测器的分辨率主要由前端模拟电路的信噪比决定，而信噪比与整形放大器的整形时间有关，整形时间越长，信噪比越高，模拟电路的输出计数率越低。测量了整形时间分别为0.25、0.5、1、2、4 μs条件下探测器的分辨率及计数率，测量结果表明探测器的分辨率为3~9 lp/mm，最高计数率为11~105 kcounts/s，只有0.5 μs整形时间放大器能满足FUV成像光谱仪对分辨率和最高计数率的要求。

A new prototype of two-dimensional photon-counting imaging detector with induced charge WSA anode in far ultraviolet (FUV) region has been developed based on the FUV imaging spectrometer′s requirements on high output count rate and spatial resolution. The detector is mainly composed of a CsI Chevron microchannel plate (MCP) stacks operating in pulse-counting mode, induced-charge wedge-strip position-sensitive anode (WSA) and correlative analog and data processing circuit. A three electrode induced-charge WSA anode with 48 mm diameter active area is designed and fabricated, and front-end analog and data collection circuit are also been developed. The space resolution for induced-charge WSA anode depends on the signal-to-noise ratio (SNR) of front-end analog circuit, while the SNR is relative to the shaping time of shaping amplifier. The longer is the shaping time, the higher is the SNR, and the lower is the maximum output rate of the front-end analog circuit. Both resolution and maximum count rate are measured for different shaping time such as 0.25, 0.5, 1, 2 and 4 μs. The measured results show that the resolution is between 4 lp/mm and 9 lp/mm, and maximum output rate is between 11 kcounts/s and 105 kcounts/s. The shaping amplifier with 0.5 μs shaping time can only completely satisfy the requirement of FUV imaging spectrometer on the spatial resolution and maximum output rate.