设计并制备了一种高集成度、低成本、低损耗4通道交叉型二氧化硅光波导延迟线阵列。利用BPM软件对交叉结构光波导延迟线的Y分支的损耗、弯曲损耗进行数值模拟。综合考虑器件尺寸和损耗参数, 设计交叉型延迟线结构的弯曲半径最小为1 500 μm, 引入优化的锥口Y分支结构和垂直相交波导结构。采用标准半导体制作工艺制备器件, 测试得到了器件的红外输出光斑, 延迟线延迟时间分别为0、113、226和339 ps。4通道二氧化硅延迟线阵列能实现相邻通道相等的延迟时间间隔, 且可通过集成实现延迟时间的增加, 同时输出端可以与光纤阵列集成。

In this paper, an integrated 4-channels silica optical waveguide delay line array with low cost and low propagation loss was designed and manufactured. BPM software was selected to simulate the associated parameters, including Y splitter and bend loss. In order to reduce the device size and insertion loss, the smallest bending radius of the delay line was selected to be 1 500 μm. And the structure of optimizing gradient Y splitter and right angle intersecting waveguide were optimized. The cross waveguide delay line device was manufactured by standard semiconductor manufacturing processes. The output infrared pattern was obtained. The delay time of each channel was 0 ps, 113 ps, 226 ps and 339 ps, respectively. The 4-channels silica waveguide delay line device can achieve an equal interval of delay time between the adjacent channels. It can be integrated with itself for several times to increase delay time. The output waveguide of the device can be integrated with the optical fiber array at the same time.